Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2
In this article nickel interdigital capacitors were fabricated on top of silicon substrates.The capacitance nitrile gloves in a bucket of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2.An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and voyage et cie d