Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

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In this article nickel interdigital capacitors were fabricated on top of silicon substrates.The capacitance nitrile gloves in a bucket of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2.An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and voyage et cie discount code with experimental measurements.

Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.